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Chain Conformation in Ultrathin Polymer Films

Published

Author(s)

Ronald L. Jones, Christopher Soles, Francis W. Starr, Eric K. Lin, Joseph~undefined~undefined~undefined~undefined~undefined Lenhart, Wen-Li Wu, D L. Goldfarb, M Angelopolous

Abstract

Using Small Angle Neutron Scattering (SANS), we present the first quantitative measurements of the 3-dimensional conformation of macromolecules in thin polymer films of D < RG,Bulk. Where D is the film thickness and RG,Bulk is the bulk radius of gyration. For D [approximately equal to] 0.5 RG,Bulk, the molecular size along the film normal is less than 0.5 RG,Bulk, while relatively small changes are observed parallel to the surface. The observed changes in molecular size agree with predictions of molecular dynamics simulations of polymers confined in thin films, resulting from increased molecular orientation rather than chain distortion. Segregation of molecular centers of mass to the film center facilitates molecular packing while minimizing chain distortion.
Proceedings Title
Advances in Resist Technology and Processing, Conference | 19th | | SPIE
Volume
4690
Issue
Pt. 1
Conference Dates
March 1, 2002
Conference Location
Santa Clara, CA
Conference Title
Proceedings of SPIE--the International Society for Optical Engineering

Keywords

chain conformation, photolithography, photoresists, polymer thin films, scattering, small angle neutron

Citation

Jones, R. , Soles, C. , Starr, F. , Lin, E. , Lenhart, J. , Wu, W. , Goldfarb, D. and Angelopolous, M. (2002), Chain Conformation in Ultrathin Polymer Films, Advances in Resist Technology and Processing, Conference | 19th | | SPIE, Santa Clara, CA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852065 (Accessed April 13, 2024)
Created November 30, 2002, Updated October 12, 2021