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PUBLICATIONS

Utilizing Near Edge X-ray Absorption Fine Structure to Probe interfacial issues in Photolithography

Published

Author(s)

Joseph~undefined~undefined~undefined~undefined~undefined Lenhart, Daniel A. Fischer, S Sambasivan, Eric K. Lin, Christopher Soles, Ronald L. Jones, Wen-Li Wu, D L. Goldfarb, M Angelopoulos
Conference Location
Boston, MA
Conference Title
Special Issue of the 2002 Symposium on Microelectronics
Pub Type
Conferences

Download Paper

Local Download

Keywords

Electronic Materials, Lithography, Microstructure, NEXAFS, Spectroscopy, Thin Films, electron yield, fluorescence, interface, photo acid generator, photoresists, polymer thin films, surface segregation

Citation

Lenhart, J. , Fischer, D. , Sambasivan, S. , Lin, E. , Soles, C. , Jones, R. , Wu, W. , Goldfarb, D. and Angelopoulos, M. (2002), Utilizing Near Edge X-ray Absorption Fine Structure to Probe interfacial issues in Photolithography, Special Issue of the 2002 Symposium on Microelectronics, Boston, MA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853914 (Accessed November 3, 2025)

Issues

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Created December 31, 2001, Updated October 12, 2021
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