TY  - CONF
AU  - Joseph~undefined~undefined~undefined~undefined~undefined Lenhart
AU  - Daniel Fischer
AU  - S Sambasivan
AU  - Eric Lin
AU  - Christopher Soles
AU  - Ronald Jones
AU  - Wen-Li Wu
AU  - D Goldfarb
AU  - M Angelopoulos
C2  - Special Issue of the 2002 Symposium on Microelectronics, Boston, MA
DA  - 2002-01-01 00:01:00
LA  - en
PB  - Special Issue of the 2002 Symposium on Microelectronics, Boston, MA
PY  - 2002
TI  - Utilizing Near Edge X-ray Absorption Fine Structure to Probe interfacial issues in Photolithography
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853914
ER  -