@conference{835891,
  author = {Joseph~undefined~undefined~undefined~undefined~undefined Lenhart and Daniel Fischer and S Sambasivan and Eric Lin and Christopher Soles and Ronald Jones and Wen-Li Wu and D Goldfarb and M Angelopoulos},
  title = {Utilizing Near Edge X-ray Absorption Fine Structure to Probe interfacial issues in Photolithography},
  year = {2002},
  month = {2002-01-01 00:01:00},
  publisher = {Special Issue of the 2002 Symposium on Microelectronics, Boston, MA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853914},
  language = {en},
}