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PUBLICATIONS

Structural Characterization of Deep Sub-Micron Lithographic Structures using Small-Angle Neutron Scattering

Published

Author(s)

Eric K. Lin, Ronald L. Jones, Wen-Li Wu, John Barker, P J. Bolton, G G. Barclay
Conference Location
Santa Clara, CA
Conference Title
Proceedings of SPIE
Pub Type
Conferences

Download Paper

Local Download

Keywords

Electronic Materials, Lithography, Nanostructured Materials, Scattering, Thin Films, critical dimension, lithography, nanoscale metrology, small angle neutron scattering

Citation

Lin, E. , Jones, R. , Wu, W. , Barker, J. , Bolton, P. and Barclay, G. (2002), Structural Characterization of Deep Sub-Micron Lithographic Structures using Small-Angle Neutron Scattering, Proceedings of SPIE, Santa Clara, CA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853837 (Accessed April 19, 2024)

Created January 1, 2002, Updated February 17, 2017