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PUBLICATIONS

Structural Characterization of Deep Sub-Micron Lithographic Structures using Small-Angle Neutron Scattering

Published

Author(s)

Eric K. Lin, Ronald L. Jones, Wen-Li Wu, John Barker, P J. Bolton, G G. Barclay
Conference Location
Santa Clara, CA
Conference Title
Proceedings of SPIE
Pub Type
Conferences

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Local Download

Keywords

Electronic Materials, Lithography, Nanostructured Materials, Scattering, Thin Films, critical dimension, lithography, nanoscale metrology, small angle neutron scattering

Citation

Lin, E. , Jones, R. , Wu, W. , Barker, J. , Bolton, P. and Barclay, G. (2002), Structural Characterization of Deep Sub-Micron Lithographic Structures using Small-Angle Neutron Scattering, Proceedings of SPIE, Santa Clara, CA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853837 (Accessed October 9, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 1, 2002, Updated February 17, 2017