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Structural Characterization of Deep Sub-Micron Lithographic Structures using Small-Angle Neutron Scattering

Published

Author(s)

Eric K. Lin, Ronald L. Jones, Wen-Li Wu, John Barker, P J. Bolton, G G. Barclay
Conference Location
Santa Clara, CA
Conference Title
Proceedings of SPIE

Keywords

Electronic Materials, Lithography, Nanostructured Materials, Scattering, Thin Films, critical dimension, lithography, nanoscale metrology, small angle neutron scattering

Citation

Lin, E. , Jones, R. , Wu, W. , Barker, J. , Bolton, P. and Barclay, G. (2002), Structural Characterization of Deep Sub-Micron Lithographic Structures using Small-Angle Neutron Scattering, Proceedings of SPIE, Santa Clara, CA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853837 (Accessed June 18, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 1, 2002, Updated February 17, 2017