@conference{168021,
  author = {Eric Lin and Ronald Jones and Wen-Li Wu and John Barker and P Bolton and G Barclay},
  title = {Structural Characterization of Deep Sub-Micron Lithographic Structures using Small-Angle Neutron Scattering},
  year = {2002},
  month = {2002-01-01},
  publisher = {Proceedings of SPIE, Santa Clara, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853837},
  language = {en},
}