TY  - CONF
AU  - Eric Lin
AU  - Ronald Jones
AU  - Wen-Li Wu
AU  - John Barker
AU  - P Bolton
AU  - G Barclay
C2  - Proceedings of SPIE, Santa Clara, CA
DA  - 2002-01-01
LA  - en
PB  - Proceedings of SPIE, Santa Clara, CA
PY  - 2002
TI  - Structural Characterization of Deep Sub-Micron Lithographic Structures using Small-Angle Neutron Scattering
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853837
ER  -