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Search Publications by: Francis J. Lovas (Assoc)

Displaying 76 - 100 of 160

Physics Laboratory Web Page: Diatomic Spectral Database http://physics.nist.gov/molspec

February 1, 2001

Author(s)

Francis J. Lovas, E Tiemann, J S. Coursey, Robert A. Dragoset

All of the rotational spectral lines observed and reported in the open literature for 83 diatomic molecules have been tabulated. The isotopic molecular species, assigned quantum numbers, observed frequency, estimated measurement uncertainty, and reference

The Rotational Spectra, Structure, Internal Dynamics, and Electric Dipole Moment of the Argon-Ketene Van der Waals Complex

January 1, 2001

Author(s)

C W. Gillies, J Z. Gillies, S J. Amadon, R D. Suenram, Francis J. Lovas, H Warner, R Malloy

Characterization of Lightpipe Radiation Thermometers for the NIST Test Bed

September 1, 2000

Author(s)

Benjamin K. Tsai, Christopher W. Meyer, Francis J. Lovas

For the past decade, lightpipe radiation theromoeters (LPRTs) have become the sensors of choice in rapid thermal processing (RTP) applications because of their non-intrusiveness and ease of use. In this paper, we discuss the importance of proper LPRT

Characterization of Lightpipe Radiation Thermometers for the NIST Test Bed

September 1, 2000

Author(s)

Benjamin K. Tsai, Christopher W. Meyer, Francis J. Lovas

The Structure of O 3 -CH 4 and the Implications for the O + CH 4 Precursor-Initiated Reaction

August 1, 2000

Author(s)

Angela R. Hight Walker, Gerald T. Fraser, R D. Suenram, Francis J. Lovas

The rotational spectrum of the O 3--CH 4 complex has been measured in a molecular beam using a pulsed-nozzle Fourier-transform microwave spectrometer. An a-type pure-rotation and a c-type rotation-inversion electric-dipole spectrum is observed, complicated

Characterization of Lightpipe Radiation Thermometers for The NIST Test Bed

January 1, 2000

Author(s)

Benjamin K. Tsai, C W. Meyer, Francis J. Lovas

The Structure of O 3 --CH 4 and the Implications for the O + CH 4 Precursor-Initiated Reaction

January 1, 2000

Author(s)

Angela R. Hight Walker, Gerald T. Fraser, R D. Suenram, Francis J. Lovas

Deployment Test of the NIST EOS Thermal-Infrared Transfer Radiometer

November 1, 1999

Author(s)

Joseph P. Rice, S C. Bender, W H. Atkins, Francis J. Lovas

The National Institute of Standards and Technology (NIST) Thermal-infrared Transfer Radiometer (TXR), developed for the National Aeronautics and Space Administration (NASA) Earth Observing System (EOS), was deployed at the remote sensing radiometric

Chamber Radiation Effects on Calibration of Radiation Thermometers With a Thin-Film Thermocouple Test Wafer

June 1, 1999

Author(s)

Benjamin K. Tsai, D P. DeWitt, Francis J. Lovas, Kenneth G. Kreider, Christopher W. Meyer, David W. Allen

In the semiconductor industry, Rapid Thermal Processing (RTP) utilizes a prescribed temperature-time recipe to silicon wafers undergoing processes such as annealing and oxide film formation. The National Technology Roadmap for Semiconductors (NTRS)

Chamber Radiation Effects on Calibration of Radiation Thermometers with a Thin-Film Thermocouple Test Wafer, ed. by J.F. Dubbeldam and M.J. de Groot

January 1, 1999

Author(s)

Benjamin K. Tsai, D P. DeWitt, Francis J. Lovas, K G. Kreider, C W. Meyer, David W. Allen

Global Analysis of a-, b- and c-Type Transitions Involving Tunneling Components of K = 0 and 1 States of the Methanol Dimer

January 1, 1999

Author(s)

C Lugez, Francis J. Lovas, Jon T. Hougen, N Ohashi

Spectral data on K = 0 and 1 levels of the methanol dimer available from previous and present Fourier transform microwave measurements have been interpreted globally, using a group-theoretically derived effective Hamiltonian and corresponding tunneling

Global Analysis of a-, b-, c- Type Transitions Involving Tunneling Components of K = 0 and 1 States of the Methanol Dimer

January 1, 1999

Author(s)

C Lugez, Francis J. Lovas, Jon T. Hougen, N Ohashi

ITS-90 Calibration of Radiometers Using Wire/Thin-Film Thermocouples in the NIST RTP Tool: Experimental Procedures and Results

January 1, 1999

Author(s)

C W. Meyers, David W. Allen, D P. DeWitt, K G. Kreider, Francis J. Lovas, Benjamin K. Tsai

The Rotational Spectrum of Ar-SiH 4 and Ar--SiD 4

January 1, 1999

Author(s)

Y Kawashima, R D. Suenram, Gerald T. Fraser, Francis J. Lovas, Katsuya Hirota

Microwave spectra of Ar-- 28SiH 4, Ar-- 29SiH 4, Ar-- 30SiH 4, and Ar-- 28SiD 4 have been recorded using a pulsed-molecular-beam Fourier-transform microwave spectrometer. The K = 0 and K = 1 components of the J=3

The Rotational Spectrum of Ar-SiH 4 and Ar-SiD 4

January 1, 1999

Author(s)

Y Kawashima, R D. Suenram, Gerald T. Fraser, Francis J. Lovas, E Hirota

Rotational Spectrum, Structure, and Electric Dipole Moment of bis(Difluoromethyl) Ether(E134)

June 1, 1998

Author(s)

R D. Suenram, Francis J. Lovas, Angela R. Hight Walker, D Dixon

The rotational spectrum of bis (difluoromethyl) ether (CF 2HOCF 2H) has been observed and analyzed using both a conventional Stark-modulated microwave spectrometer and a pulsed-molecular-beam Fabry-Perot cavity microwave (FTMW) spectrometer. The lowest

RTP Calibration Wafer Using Thin-Film Thermocouples

April 1, 1998

Author(s)

Kenneth G. Kreider, D P. DeWitt, Benjamin K. Tsai, Francis J. Lovas, David W. Allen

Rapid thermal processing (RTP) is a key technology for the cluster tool, single wafer manufacturing approach that is used to produce integrated circuits at lower cost with reduced line widths and thermal budgets. However, various problems associated with

Calibration Wafer for Temperature Measurement in RTP Tools

January 1, 1998

Author(s)

K G. Kreider, D P. DeWitt, Benjamin K. Tsai, Francis J. Lovas, David W. Allen

High-Resolution Microwave and Infrared Molecular Beam Studies of the Conformer of 1,1,2,2-Tetrafluoroethane

January 1, 1998

Author(s)

S C. Stone, L A. Philips, Gerald T. Fraser, Francis J. Lovas, L H. Xu, S W. Sharpe

Meeting RTP Temperature Accuracy Requirements: Measurement and Calibrations at NIST, ed. by M.C. Ozturk, F. Roozeboom, P.J. Timans, and S.H. Pas

January 1, 1998

Author(s)

Francis J. Lovas, Benjamin K. Tsai, Charles E. Gibson

Observation of Tunneling States within the Two Conformations of Hydroxyl gauche, Methyl asymmetric CH 2 DCH 2 OH

January 1, 1998

Author(s)

R D. Suenram, Francis J. Lovas, C R. Quade, C F. Su

Rotational Spectrum, Structure, and Electric Dipole Moment of bis (Difluoromethyl) Ether (E134)

January 1, 1998

Author(s)

R D. Suenram, Francis J. Lovas, Angela R. Hight Walker, D A. Dixon

RTP Calibration Wafer Using Thin-Film Thermocouples, ed. by M.C. Ozturk, F. Roozeboom, P.J. Timans, and S.H. Pas

January 1, 1998

Author(s)

K G. Kreider, D P. DeWitt, Benjamin K. Tsai, Francis J. Lovas, David W. Allen

Observation of Tunneling States Within the Two Conformations of Hydroxyl Gauche, Methyl Asymmetric CH 2 DCH 2 OH

October 1, 1997

Author(s)

R D. Suenram, Francis J. Lovas, C R. Quade, C F. Su

Fourier Transform Microwave (FTMW) Spectroscopy has been used to observe and resolve the 60 kHz tunneling splitting between the symmetric and antisymmetric substates of conformations I and II for hydroxyl gauche, methyl asymmetric CH 2DCH 2OH. Conformation

Detection and Confirmation of Interstellar Acetic Acid

January 1, 1997

Author(s)

D M. Mehringer, Lewis E. Snyder, Y Miao, Francis J. Lovas