Characterization of Lightpipe Radiation Thermometers for the NIST Test Bed
Benjamin K. Tsai, Christopher W. Meyer, Francis J. Lovas
For the past decade, lightpipe radiation theromoeters (LPRTs) have become the sensors of choice in rapid thermal processing (RTP) applications because of their non-intrusiveness and ease of use. In this paper, we discuss the importance of proper LPRT calibration for accurate temperature measurements in RTP applications and present the first complete description of LPRT calibrations at the National Institute of Standards and Technology (NIST). First, we introduce the lightpipes (LPs) and outline the NIST calibration procedures, facilities, and results. Second, we describe the spectral, spatial, and temporal characterization of the LPRTs. Next, we explore the thermal effects on the LP measurement of the extraneous radiation scattered into the LP from the side and emitted from the LP itself. Then we present the results of the optical characterization of the LPs, which include a visual inspection and a quantitative study of the scattered radiation. After a discussion of discrepancies between factory and NIST calibrations, we summarize with the conclusions of this study and offer a list of recommendations for proper LPRT calibration.
Proceedings of the 8th International Conference on Advanced Thermal Processing of Semiconductors - RTP '2000
September 18-21, 2000
International Symposium on Advanced Thermal Processing of Semiconductors
, Meyer, C.
and Lovas, F.
Characterization of Lightpipe Radiation Thermometers for the NIST Test Bed, Proceedings of the 8th International Conference on Advanced Thermal Processing of Semiconductors - RTP '2000
(Accessed June 8, 2023)