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ITS-90 Calibration of Radiometers Using Wire/Thin-Film Thermocouples in the NIST RTP Tool: Experimental Procedures and Results

Published

Author(s)

C W. Meyers, David W. Allen, D P. DeWitt, K G. Kreider, Francis J. Lovas, Benjamin K. Tsai
Proceedings Title
7^uth^ International Conference on Advanced Thermal Processing of Semiconductors
Conference Location
Pages: 136-141, 1, AS
Conference Title
Colorado Springs, CO September 1-1, 1999

Citation

Meyers, C. , Allen, D. , DeWitt, D. , Kreider, K. , Lovas, F. and Tsai, B. (1999), ITS-90 Calibration of Radiometers Using Wire/Thin-Film Thermocouples in the NIST RTP Tool: Experimental Procedures and Results, 7^uth^ International Conference on Advanced Thermal Processing of Semiconductors, Pages: 136-141, 1, AS (Accessed November 29, 2023)
Created December 31, 1998, Updated October 12, 2021