Meyers, C.
, Allen, D.
, DeWitt, D.
, Kreider, K.
, Lovas, F.
and Tsai, B.
(1999),
ITS-90 Calibration of Radiometers Using Wire/Thin-Film Thermocouples in the NIST RTP Tool: Experimental Procedures and Results, 7^uth^ International Conference on Advanced Thermal Processing of Semiconductors, Pages: 136-141, 1, AS
(Accessed December 5, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
ITS-90 Calibration of Radiometers Using Wire/Thin-Film Thermocouples in the NIST RTP Tool: Experimental Procedures and Results
Published
Author(s)
C W. Meyers, , , K G. Kreider, ,
Proceedings Title
7^uth^ International Conference on Advanced Thermal Processing of Semiconductors
Conference Location
Pages: 136-141, 1, AS
Conference Title
Colorado Springs, CO September 1-1, 1999
Pub Type
Conferences
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created December 31, 1998, Updated October 12, 2021