TY  - CONF
AU  - C Meyers
AU  - David Allen
AU  - D DeWitt
AU  - K Kreider
AU  - Francis Lovas
AU  - Benjamin Tsai
C2  - 7^uth^ International Conference on Advanced Thermal Processing of Semiconductors, Pages: 136-141, 1, AS
DA  - 1999-01-01 00:01:00
LA  - en
PB  - 7^uth^ International Conference on Advanced Thermal Processing of Semiconductors, Pages: 136-141, 1, AS
PY  - 1999
TI  - ITS-90 Calibration of Radiometers Using Wire/Thin-Film Thermocouples in the NIST RTP Tool: Experimental Procedures and Results
ER  -