Lovas, F.
, Tsai, B.
and Gibson, C.
(1998),
Meeting RTP Temperature Accuracy Requirements: Measurement and Calibrations at NIST, ed. by M.C. Ozturk, F. Roozeboom, P.J. Timans, and S.H. Pas, Rapid Thermal and Integrated Processing. VII , San Francisco, CA
(Accessed November 7, 2024)