Lovas, F.
, Tsai, B.
and Gibson, C.
(1998),
Meeting RTP Temperature Accuracy Requirements: Measurement and Calibrations at NIST, ed. by M.C. Ozturk, F. Roozeboom, P.J. Timans, and S.H. Pas, Rapid Thermal and Integrated Processing. VII , San Francisco, CA
(Accessed May 14, 2024)
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Meeting RTP Temperature Accuracy Requirements: Measurement and Calibrations at NIST, ed. by M.C. Ozturk, F. Roozeboom, P.J. Timans, and S.H. Pas
Published
Author(s)
, ,
Proceedings Title
Rapid Thermal and Integrated Processing. VII
Volume
525
Conference Dates
April 13-17, 1998
Conference Location
San Francisco, CA
Conference Title
Mat. Res. Soc. Symp. Proc.
Pub Type
Conferences
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created January 1, 1998, Updated February 17, 2017