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Meeting RTP Temperature Accuracy Requirements: Measurement and Calibrations at NIST, ed. by M.C. Ozturk, F. Roozeboom, P.J. Timans, and S.H. Pas

Published

Author(s)

Francis J. Lovas, Benjamin K. Tsai, Charles E. Gibson
Proceedings Title
Rapid Thermal and Integrated Processing. VII
Volume
525
Conference Dates
April 13-17, 1998
Conference Location
San Francisco, CA
Conference Title
Mat. Res. Soc. Symp. Proc.

Citation

Lovas, F. , Tsai, B. and Gibson, C. (1998), Meeting RTP Temperature Accuracy Requirements: Measurement and Calibrations at NIST, ed. by M.C. Ozturk, F. Roozeboom, P.J. Timans, and S.H. Pas, Rapid Thermal and Integrated Processing. VII , San Francisco, CA (Accessed April 14, 2024)
Created January 1, 1998, Updated February 17, 2017