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RTP Calibration Wafer Using Thin-Film Thermocouples, ed. by M.C. Ozturk, F. Roozeboom, P.J. Timans, and S.H. Pas

Published

Author(s)

K G. Kreider, D P. DeWitt, Benjamin K. Tsai, Francis J. Lovas, David W. Allen
Citation
Rapid Thermal and Integrated Processing VIIMat Res Soc Symp
Volume
525

Citation

Kreider, K. , DeWitt, D. , Tsai, B. , Lovas, F. and Allen, D. (1998), RTP Calibration Wafer Using Thin-Film Thermocouples, ed. by M.C. Ozturk, F. Roozeboom, P.J. Timans, and S.H. Pas, Rapid Thermal and Integrated Processing VIIMat Res Soc Symp (Accessed April 14, 2024)
Created December 31, 1997, Updated October 12, 2021