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PUBLICATIONS

RTP Calibration Wafer Using Thin-Film Thermocouples, ed. by M.C. Ozturk, F. Roozeboom, P.J. Timans, and S.H. Pas

Published

Author(s)

K G. Kreider, D P. DeWitt, Benjamin K. Tsai, Francis J. Lovas, David W. Allen
Citation
Rapid Thermal and Integrated Processing VIIMat Res Soc Symp
Volume
525
Pub Type
Journals

Citation

Kreider, K. , DeWitt, D. , Tsai, B. , Lovas, F. and Allen, D. (1998), RTP Calibration Wafer Using Thin-Film Thermocouples, ed. by M.C. Ozturk, F. Roozeboom, P.J. Timans, and S.H. Pas, Rapid Thermal and Integrated Processing VIIMat Res Soc Symp (Accessed May 18, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created December 31, 1997, Updated October 12, 2021