Kreider, K.
, DeWitt, D.
, Tsai, B.
, Lovas, F.
and Allen, D.
(1998),
RTP Calibration Wafer Using Thin-Film Thermocouples, ed. by M.C. Ozturk, F. Roozeboom, P.J. Timans, and S.H. Pas, Rapid Thermal and Integrated Processing VIIMat Res Soc Symp
(Accessed October 10, 2024)
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RTP Calibration Wafer Using Thin-Film Thermocouples, ed. by M.C. Ozturk, F. Roozeboom, P.J. Timans, and S.H. Pas
Published
Author(s)
K G. Kreider, , , ,
Citation
Rapid Thermal and Integrated Processing VIIMat Res Soc Symp
Volume
525
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created December 31, 1997, Updated October 12, 2021