@article{784631,
  author = {K Kreider and D DeWitt and Benjamin Tsai and Francis Lovas and David Allen},
  title = {RTP Calibration Wafer Using Thin-Film Thermocouples, ed. by M.C. Ozturk, F. Roozeboom, P.J. Timans, and S.H. Pas},
  year = {1998},
  number = {525},
  month = {1998-01-01 00:01:00},
  publisher = {Rapid Thermal and Integrated Processing VIIMat Res Soc Symp},
  language = {en},
}