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Displaying 876 - 900 of 930

Gate Dielectric Thickness Metrology Using Transmission Electron Microscopy

January 1, 2000
Author(s)
J H. Scott, Eric S. Windsor, D Brady, J Canterbury, A. Karamcheti, W Chism, A C. Diebold
Silicon Oxynitride blanket films approximately 2 n min thickness are characterized in cross section using a 300 keV TEM/STEM. High resolution imaging is used to investigate the accuracy and precision of TEM film thickness measurements and their

Si Resonant Interband Tunnel Diodes Grown by Low-Temperature Molecular Beam Epitaxy

August 1, 1999
Author(s)
P E. Thompson, K D. Hobart, M E. Twigg, G Jernigan, T E. Dillon, S L. Rommel, P R. Berger, David S. Simons, P Chi, R Lake, A C. Seabaugh
Si resonant interband tunnel diodes that demonstrate negative differential resistance at room temperature are presented. The structures were grown using low temperature (320 C) molecular beam epitaxy followed by a post-growth anneal. After a 650 C, 1 min

SRM 2806 (ISO Medium Test Dust in Hydraulic Oil): A Particle-Contamination Standard Reference Material for the Fluid Power Industry

August 1, 1999
Author(s)
Robert A. Fletcher, Jennifer R. Verkouteren, Eric S. Windsor, David S. Bright, Eric B. Steel, John A. Small, Walter S. Liggett Jr
Standard Reference material (SRM) 2806 is composed of ISO medium test dust (ISO 12103-A3), a mineral dust, suspended in MIL-H-5606 hydraulic oil. SRM 2806 is a traceable particle count standard and is certified for number of particles larger than a

A Unique Institution: The History of NBS, 1950-1969

June 30, 1999
Author(s)
E Passaglia, K A. Beal
A follow-on to Measures for Progress by Rexmond C. Cochrane, this work covers the history of the National Bureau of Standards (NBS) from 1950-1969. While the book focuses on technical work, the management and administration of the Bureau are also discussed

Elemental and Molecular Imaging of Human Hair Using Secondary Ion Mass Spectrometry

April 1, 1999
Author(s)
John G. Gillen, S V. Roberson, C M. Ng, M Stranick
Secondary ion mass spectrometry (SIMS) is used to image the spatial distribution of elemental and molecular species on the surface and in cross-sections of doped human hair using a magnetic sector SIMS instrument operated as an ion microprobe. Analysis of

Quantitative secondary ion mass spectrometry imaging of self-assembled monolayer films for electron beam dose mapping in the environmental scanning electron microscope

July 1, 1998
Author(s)
John G. Gillen, Scott A. Wight, David S. Bright, T M. Herne
Fluorinated alkanethiol self assembled monolayers (SAM) films immobilized on gold substrates have been used as electron-sensitive resists to map quantitatively the spatial distribution of the primary electron beam scattering in an environmental scanning

Atomic Hydrogen for the Formation of Abrupt Sb Doping Profiles in MBE-Grown Si

May 1, 1998
Author(s)
P E. Thompson, C Silvestre, M E. Twigg, G Jernigan, David S. Simons
Previously atomic hydrogen has been shown to be effective in reducing the segregation of Ge on Si[100] during solid source molecular beam epitaxygrowth. In this work we have investigated atomic hydrogen to determine if it is equally effective in reducing
Displaying 876 - 900 of 930
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