Wight, S.
and Zeissler, C.
(2000),
Direct Measurement of Electron Beam Scattering in the Environmental Scanning Electron Microscope Using Phosphor Imaging Plates, Scanning
(Accessed December 2, 2023)
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Direct Measurement of Electron Beam Scattering in the Environmental Scanning Electron Microscope Using Phosphor Imaging Plates
Published
Author(s)
,
Abstract
Phosphor imaging plate technology has made it possible to directly image the distribution of primary beam electrons and scattered electrons in the environmental scanning electron microscope. The phosphor plate is exposed under electron scattering conditions in the microscope chamber. When processed, the electron intensity distribution is displayed as a digital image. The image is a visual representation of the electron probe and skirt and may provide the basis for a more accurate model.Citation
Scanning
Volume
22
Issue
No. 3
Pub Type
Journals
Keywords
electron scattering, environmental scanning electron microsco, phosphor imaging plates, photostimulable
Citation
Created May 1, 2000, Updated February 19, 2017