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Preliminary Evaluation of an SF5+ Polyatomic Primary Ion Beam for Analysis of Organic Thin Films by Secondary Ion Mass Spectrometry

Published

Author(s)

John G. Gillen, S V. Roberson
Citation
Rapid Communications in Mass Spectrometry
Volume
12

Citation

Gillen, J. and Roberson, S. (1998), Preliminary Evaluation of an SF5+ Polyatomic Primary Ion Beam for Analysis of Organic Thin Films by Secondary Ion Mass Spectrometry, Rapid Communications in Mass Spectrometry (Accessed April 12, 2024)
Created December 1, 1998, Updated February 19, 2017