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Preliminary Evaluation of an SF5+ Polyatomic Primary Ion Beam for Analysis of Organic Thin Films by Secondary Ion Mass Spectrometry

Published

Author(s)

John G. Gillen, S V. Roberson
Citation
Rapid Communications in Mass Spectrometry
Volume
12

Citation

Gillen, J. and Roberson, S. (1998), Preliminary Evaluation of an SF5+ Polyatomic Primary Ion Beam for Analysis of Organic Thin Films by Secondary Ion Mass Spectrometry, Rapid Communications in Mass Spectrometry (Accessed December 5, 2024)

Issues

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Created December 1, 1998, Updated February 19, 2017