@article{108796,
  author = {John Gillen and S Roberson},
  title = {Preliminary Evaluation of an SF5+ Polyatomic Primary Ion Beam for Analysis of Organic Thin Films by Secondary Ion Mass Spectrometry},
  year = {1998},
  number = {12},
  month = {1998-12-01},
  publisher = {Rapid Communications in Mass Spectrometry},
  language = {en},
}