Thompson, P.
, Silvestre, C.
, Twigg, M.
, Jernigan, G.
and Simons, D.
(1998),
The Formation of Abrupt n+ Doping Profiles Using Atomic Hydrogen and Sb During Si MBE, Materials Research Society Symposium, none, PA
(Accessed October 13, 2024)
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The Formation of Abrupt n+ Doping Profiles Using Atomic Hydrogen and Sb During Si MBE
Published
Author(s)
P E. Thompson, C Silvestre, M E. Twigg, G Jernigan,
Proceedings Title
Materials Research Society Symposium
Conference Dates
February 11, 2009
Conference Location
none, PA
Conference Title
Proceedings of Materials Research Society Symposium
Pub Type
Conferences
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created November 30, 1998, Updated October 12, 2021