@conference{795361,
  author = {P Thompson and C Silvestre and M Twigg and G Jernigan and David Simons},
  title = {The Formation of Abrupt n+ Doping Profiles Using Atomic Hydrogen and Sb During Si MBE},
  year = {1998},
  month = {1998-12-01 00:12:00},
  publisher = {Materials Research Society Symposium, none, PA},
  language = {en},
}