TY  - CONF
AU  - P Thompson
AU  - C Silvestre
AU  - M Twigg
AU  - G Jernigan
AU  - David Simons
C2  - Materials Research Society Symposium, none, PA
DA  - 1998-12-01 00:12:00
LA  - en
PB  - Materials Research Society Symposium, none, PA
PY  - 1998
TI  - The Formation of Abrupt n+ Doping Profiles Using Atomic Hydrogen and Sb During Si MBE
ER  -