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Displaying 576 - 600 of 1414

Radio Frequency and Analog/Mixed-Signal Technologies

January 20, 2012
Author(s)
Herbert S. Bennett, John J. Pekarik
This 2011 roadmap for radio frequency and analog/mixed-signal (RF and AMS) technologies presents the challenges, technology requirements, and potential solutions for the basic technology elements (transistors and passive devices). RF and AMS technologies

Origin of Electrical Signals for Plasma Etching Endpoint Detection

November 18, 2011
Author(s)
Mark A. Sobolewski
Electrical signals are used for endpoint detection in plasma etching, but the origin of the electrical changes observed at endpoint is not known. They may be caused by changes in the gas-phase densities of etch products and reactants or by changes in

In Situ Gas Phase Diagnostics for Titanium Nitride Atomic Layer Deposition

October 14, 2011
Author(s)
James E. Maslar, William A. Kimes, Brent A. Sperling
This report describes the performance of a technique for the simultaneous, rapid measurement of major gas phase species present during titanium nitride thermal atomic layer deposition involving tetrakis(dimethylamido) titanium (TDMAT) and ammonia. In this

Radiation, Multimode Propagation, and Substrate Modes in W-Band CPW Calibrations

October 10, 2011
Author(s)
Dylan F. Williams, Franz-Joseph Schmuckle, Ralf Dorner, G.N. Phung, Wolfgang Heinrich, Uwe Arz
We investigate the degradation of the accuracy of coplanar waveguide calibration standards at higher frequencies due to multi-mode propagation, substrate modes, and radiation. Based on a typical calibration substrate, we investigate these effects and their

In Situ Gas Phase Measurements During Metal Alkylamide Atomic Layer Deposition

July 12, 2011
Author(s)
James E. Maslar, William A. Kimes, Brent A. Sperling
Metal alkylamide compounds, such as tetrakis(ethylmethylamido) hafnium (TEMAH), represent a technologically important class of metalorganic precursors for the deposition of metal oxides and metal nitrides via atomic layer deposition (ALD) or chemical vapor

Stable isotope-labeling of DNA repair proteins, and their purification and characterization

July 1, 2011
Author(s)
M Miral Dizdar, Pawel Jaruga, Prasad T. Reddy, Bryant C. Nelson, Mark S. Lowenthal
Reduced DNA repair capacity is associated with increased risk for a variety of disease processes including carcinogenesis. Thus, DNA repair proteins have the potential to be used as important predictive, prognostic and therapeutic biomarkers in cancer and

Selective Pixel Interpolation for Spatial Error Concealment

June 1, 2011
Author(s)
Hamid Gharavi, Yi Ge, Bo Yan, Kairan Sun
This paper proposes an effective algorithm for spatial error concealment with accurate edge detection and partitioning interpolation. Firstly, a new method is used for detecting possible edge pixels and their matching pixels around the lost block. Then

Fluid interactions with metafilm/metasurfaces for tuning, sensing, and microwave assisted chemical processes

May 25, 2011
Author(s)
Joshua A. Gordon, Christopher L. Holloway, James C. Booth, James R. Baker-Jarvis, David R. Novotny, Sung Kim, Yu Y. Wang
In this paper we demonstrate tunability of a metafilm, which is the two-dimensional equivalent of a metamaterial, also referred to as a metasurface, by changing the permittivity in a micro-fluidic channel that interacts with the metafilm. Numerical
Displaying 576 - 600 of 1414
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