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Low Energy, Ion-Induced Electron and Ion Emission from Stainless Steel: The Effect of Oxygen Coverage and the Implications for Discharge Modeling

Published

Author(s)

S. G. Walton, J. C. Tucek, R. Champion, Yicheng Wang

Abstract

Absolute yields of electrons and negative ions resulting from positive ions impacting stainless steel have been determined as a function of impact energy for clean and oxygen-covered surfaces. Photoelectron emission has been used to monitor the effect of oxygen coverage on the surface work function. The emission of negative ions and electrons has been described with an excitation mechanism similar to that used in the Menzel-Gomer-Redhead model. We illustrate the implications of the present observations for discharge modeling and diagnostics by citing a parallel-plate, rf discharge in oxygen as an example.
Citation
Journal of Applied Physics
Volume
85
Issue
3

Keywords

negative ion emission, photon-induced emission, rf discharges, secondary emission, stainless steel, surface work function

Citation

Walton, S. , Tucek, J. , Champion, R. and Wang, Y. (1999), Low Energy, Ion-Induced Electron and Ion Emission from Stainless Steel: The Effect of Oxygen Coverage and the Implications for Discharge Modeling, Journal of Applied Physics, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=27176 (Accessed April 12, 2024)
Created January 31, 1999, Updated October 12, 2021