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Ion Energy Distributions in Inductively Coupled Radio-Frequency Discharges in Argon, Nitrogen, Oxygen, Chlorine, and Their Mixtures

Published

Author(s)

Yicheng Wang, James K. Olthoff

Abstract

We report ion energy distributions, relative ion intensities, and absolute total ion current densities at the grounded electrode of an inductively-coupled Gaseous Electronics Conference radio-frequency reference cell for discharges generated in pure argon, nitrogen, oxygen and chlorine, and in mixtures of argon with N2, O2, and Cl2. Measured current densities are significantly greater for pure argon and for mixtures containing argon than for pure N2, O2, and Cl2. For all three molecular gases, the ratio of molecular ions to the fragment ions decreases when argon is added to the molecular gas discharges. A possible destruction mechanism for the molecular ions involving metastable argon is discussed.
Citation
Journal of Applied Physics
Issue
9

Keywords

argon, chlorine, inductively-coupled plasmas, ion energy distributions, nitrogen, oxygen

Citation

Wang, Y. and Olthoff, J. (1999), Ion Energy Distributions in Inductively Coupled Radio-Frequency Discharges in Argon, Nitrogen, Oxygen, Chlorine, and Their Mixtures, Journal of Applied Physics, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=1506 (Accessed April 22, 2024)
Created April 30, 1999, Updated October 12, 2021