@article{781446,
  author = {Yicheng Wang and James Olthoff},
  title = {Ion Energy Distributions in Inductively Coupled Radio-Frequency Discharges in Argon, Nitrogen, Oxygen, Chlorine, and Their Mixtures},
  year = {1999},
  month = {1999-05-01 00:05:00},
  publisher = {Journal of Applied Physics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=1506},
  language = {en},
}