TY  - JOUR
AU  - Yicheng Wang
AU  - James Olthoff
C2  - Journal of Applied Physics
DA  - 1999-05-01 00:05:00
LA  - en
PB  - Journal of Applied Physics
PY  - 1999
TI  - Ion Energy Distributions in Inductively Coupled Radio-Frequency Discharges in Argon, Nitrogen, Oxygen, Chlorine, and Their Mixtures
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=1506
ER  -