May 1, 2006
      
                  
        
  Author(s)
  Sei-Hyung  Ryu,   Sumi  Krishnaswami,   Hull  Brett,   James  Richmond,   Anant  Agarwal,   Allen R. Hefner Jr.
 
       
            
    
    
        In this paper, we report 4H-SiC power DMOSFETs capable of blocking 10 kV. The devices were scaled up to 5 A, which is a factor of 25 increase in device area compared to the previously reported value. The devices utilized 100 υm thick n-type epilayers with