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Asymmetric Dielectric Trilayer Cantilever Probe for Calorimetric High-Frequency Field Imaging

Published

Author(s)

Simone Lee, Thomas M. Wallis, John M. Moreland, Pavel Kabos, Y. C. Lee

Abstract

Magnetic field imaging probes are developed in this work. Multi-material, MEMS-based cantilever probes were developed for high frequency magnetic field imaging. The basic configuration of the probe consists of a cantilever beam fabricated by surface micromachining and bulk micormachining techniques with dielectric silicon nitride and silicon oxide materials, on a silicon wafer. A gold patterned metallization at the tip of the cantilever provides a source of eddy current heating due to the perpendicular component of the high frequency magnetic field. This thermally-absorbed power is converted to mechanical deflection by a multi-materials trilayer cantilever system. The deflection is measured with a beam-bounce optical technique employed in AFM systems. We discuss the modeling, design, fabrication, and characterization of these field imaging probes
Citation
IEEE Journal of Microelectromechanical Systems
Volume
16
Issue
1

Keywords

MEMS probe, RF AFM, multilayer cantilever, high frequency field imaging

Citation

Lee, S. , Wallis, T. , Moreland, J. , Kabos, P. and Lee, Y. (2007), Asymmetric Dielectric Trilayer Cantilever Probe for Calorimetric High-Frequency Field Imaging, IEEE Journal of Microelectromechanical Systems, [online], https://doi.org/10.1109/JMEMS.2006.885849 (Accessed May 18, 2024)

Issues

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Created February 12, 2007, Updated January 27, 2020