Asymmetric Dielectric Trilayer Cantilever Probe for Calorimetric High-Frequency Field Imaging
Simone Lee, Thomas M. Wallis, John M. Moreland, Pavel Kabos, Y. C. Lee
Magnetic field imaging probes are developed in this work. Multi-material, MEMS-based cantilever probes were developed for high frequency magnetic field imaging. The basic configuration of the probe consists of a cantilever beam fabricated by surface micromachining and bulk micormachining techniques with dielectric silicon nitride and silicon oxide materials, on a silicon wafer. A gold patterned metallization at the tip of the cantilever provides a source of eddy current heating due to the perpendicular component of the high frequency magnetic field. This thermally-absorbed power is converted to mechanical deflection by a multi-materials trilayer cantilever system. The deflection is measured with a beam-bounce optical technique employed in AFM systems. We discuss the modeling, design, fabrication, and characterization of these field imaging probes
, Wallis, T.
, Moreland, J.
, Kabos, P.
and Lee, Y.
Asymmetric Dielectric Trilayer Cantilever Probe for Calorimetric High-Frequency Field Imaging, IEEE Journal of Microelectromechanical Systems, [online], https://doi.org/10.1109/JMEMS.2006.885849
(Accessed December 8, 2023)