Asymmetric Dielectric Trilayer Cantilever Probe for Calorimetric High-Frequency Field Imaging

Published

February 12, 2007

Author(s)

Simone Lee, Thomas M. Wallis, John M. Moreland, Pavel Kabos, Y. C. Lee

Abstract

Magnetic field imaging probes are developed in this work. Multi-material, MEMS-based cantilever probes were developed for high frequency magnetic field imaging. The basic configuration of the probe consists of a cantilever beam fabricated by surface micromachining and bulk micormachining techniques with dielectric silicon nitride and silicon oxide materials, on a silicon wafer. A gold patterned metallization at the tip of the cantilever provides a source of eddy current heating due to the perpendicular component of the high frequency magnetic field. This thermally-absorbed power is converted to mechanical deflection by a multi-materials trilayer cantilever system. The deflection is measured with a beam-bounce optical technique employed in AFM systems. We discuss the modeling, design, fabrication, and characterization of these field imaging probes

Citation

IEEE Journal of Microelectromechanical Systems

Volume

16

Issue

1

Pub Type

Journals

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DOI Link

Keywords

MEMS probe, RF AFM, multilayer cantilever, high frequency field imaging

Citation

Lee, S. , Wallis, T. , Moreland, J. , Kabos, P. and Lee, Y. (2007), Asymmetric Dielectric Trilayer Cantilever Probe for Calorimetric High-Frequency Field Imaging, IEEE Journal of Microelectromechanical Systems, [online], https://doi.org/10.1109/JMEMS.2006.885849 (Accessed October 9, 2025)