July 19, 2018
Author(s)
James A. Liddle, Brian D. Hoskins, Andras Vladar, John S. Villarrubia
… challenges facing electron-based metrology for post-CMOS technology are reviewed. Directed self-assembly, … requirements: defect detection, possibly subsurface, in soft materials, accurate measurement of size, shape, and … or electronic changes of state associated with switching in non-volatile memory elements. Electron-beam techniques are …