U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Non-contact Electrical Critical Dimensions Metrology Sensor for Chrome Photomasks

Published

Author(s)

Nadine Guillaume, Markku Lahti, Michael W. Cresswell, Richard A. Allen, Loren W. Linholm, Mona E. Zaghloul
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE)
Volume
4562
Conference Dates
October 2-5, 2001
Conference Location
Monterey, CA, USA
Conference Title
21st Annual BACUS Symposium on Photomask Technology
Pub Type
Conferences

Keywords

CD, Metrology, Photomask

Citation

Guillaume, N. , Lahti, M. , Cresswell, M. , Allen, R. , Linholm, L. and Zaghloul, M. (2002), Non-contact Electrical Critical Dimensions Metrology Sensor for Chrome Photomasks, Proc. Intl. Soc. for Optical Engineering (SPIE), Monterey, CA, USA (Accessed October 7, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created September 30, 2002, Updated October 12, 2021