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Non-contact Electrical Critical Dimensions Metrology Sensor for Chrome Photomasks

Published

Author(s)

Nadine Guillaume, Markku Lahti, Michael W. Cresswell, Richard A. Allen, Loren W. Linholm, Mona E. Zaghloul
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE)
Volume
4562
Conference Dates
October 2-5, 2001
Conference Location
Monterey, CA, USA
Conference Title
21st Annual BACUS Symposium on Photomask Technology

Keywords

CD, Metrology, Photomask

Citation

Guillaume, N. , Lahti, M. , Cresswell, M. , Allen, R. , Linholm, L. and Zaghloul, M. (2002), Non-contact Electrical Critical Dimensions Metrology Sensor for Chrome Photomasks, Proc. Intl. Soc. for Optical Engineering (SPIE), Monterey, CA, USA (Accessed June 13, 2024)

Issues

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Created September 30, 2002, Updated October 12, 2021