@conference{847286,
  author = {Nadine Guillaume and Markku Lahti and Michael Cresswell and Richard Allen and Loren Linholm and Mona Zaghloul},
  title = {Non-contact Electrical Critical Dimensions Metrology Sensor for Chrome Photomasks},
  year = {2002},
  number = {4562},
  month = {2002-10-01 00:10:00},
  publisher = {Proc. Intl. Soc. for Optical Engineering (SPIE), Monterey, CA, USA},
  language = {en},
}