TY  - CONF
AU  - Nadine Guillaume
AU  - Markku Lahti
AU  - Michael Cresswell
AU  - Richard Allen
AU  - Loren Linholm
AU  - Mona Zaghloul
C2  - Proc. Intl. Soc. for Optical Engineering (SPIE), Monterey, CA, USA
DA  - 2002-10-01 00:10:00
LA  - en
M1  - 4562
PB  - Proc. Intl. Soc. for Optical Engineering (SPIE), Monterey, CA, USA
PY  - 2002
TI  - Non-contact Electrical Critical Dimensions Metrology Sensor for Chrome Photomasks
ER  -