Chen-Mayer, H.
, Lamaze, G.
and Satija, S.
(2001),
Characterization of BPSG films using Neutron Depth Profiling and Neutron/X-ray Reflectometry, Characterization and Metrology for ULSI Technology 2000:International Conference
, Gaithersburg, MD
(Accessed October 13, 2024)
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Characterization of BPSG films using Neutron Depth Profiling and Neutron/X-ray Reflectometry
Published
Author(s)
, ,
Volume
550
Issue
1
Conference Dates
June 26-29, 2000
Conference Location
Gaithersburg, MD
Conference Title
Characterization and Metrology for ULSI Technology 2000:International Conference
Pub Type
Conferences
Citation
Issues
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Created January 29, 2001, Updated February 19, 2017