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Characterization of BPSG films using Neutron Depth Profiling and Neutron/X-ray Reflectometry

Published

Author(s)

Huaiyu H. Chen-Mayer, George P. Lamaze, Sushil K. Satija
Volume
550
Issue
1
Conference Dates
June 26-29, 2000
Conference Location
Gaithersburg, MD
Conference Title
Characterization and Metrology for ULSI Technology 2000:International Conference

Citation

Chen-Mayer, H. , Lamaze, G. and Satija, S. (2001), Characterization of BPSG films using Neutron Depth Profiling and Neutron/X-ray Reflectometry, Characterization and Metrology for ULSI Technology 2000:International Conference , Gaithersburg, MD (Accessed May 25, 2024)

Issues

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Created January 29, 2001, Updated February 19, 2017