TY  - CONF
AU  - Huaiyu Chen-Mayer
AU  - George Lamaze
AU  - Sushil Satija
C2  - Characterization and Metrology for ULSI Technology 2000:International Conference
, Gaithersburg, MD
DA  - 2001-01-29
LA  - en
M1  - 550
PB  - Characterization and Metrology for ULSI Technology 2000:International Conference
, Gaithersburg, MD
PY  - 2001
TI  - Characterization of BPSG films using Neutron Depth Profiling and Neutron/X-ray Reflectometry
ER  -