@conference{68141,
  author = {Huaiyu Chen-Mayer and George Lamaze and Sushil Satija},
  title = {Characterization of BPSG films using Neutron Depth Profiling and Neutron/X-ray Reflectometry},
  year = {2001},
  number = {550},
  month = {2001-01-29},
  publisher = {Characterization and Metrology for ULSI Technology 2000:International Conference
, Gaithersburg, MD},
  language = {en},
}