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Small-Angle Neutron Scattering Measurements for the Characterization of Lithographically Prepared Structures

Published

Author(s)

Wen-Li Wu, Eric K. Lin, Q Lin, M Angelopolous
Conference Location
Gaithersburg, MD
Conference Title
Characterization and Metrology for ULSI Technology: 2000 International Conference

Keywords

critical dimension, electronic materials, line edge roughness, lithography, microstructure, nanofabrication, scattering, small angle neutron scattering, thin films

Citation

Wu, W. , Lin, E. , Lin, Q. and Angelopolous, M. (2000), Small-Angle Neutron Scattering Measurements for the Characterization of Lithographically Prepared Structures, Characterization and Metrology for ULSI Technology: 2000 International Conference, Gaithersburg, MD, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853678 (Accessed April 14, 2024)
Created January 1, 2000, Updated February 17, 2017