TY  - CONF
AU  - Wen-Li Wu
AU  - Eric Lin
AU  - Q Lin
AU  - M Angelopolous
C2  - Characterization and Metrology for ULSI Technology: 2000 International Conference,  Gaithersburg, MD
DA  - 2000-01-01
LA  - en
PB  - Characterization and Metrology for ULSI Technology: 2000 International Conference,  Gaithersburg, MD
PY  - 2000
TI  - Small-Angle Neutron Scattering Measurements for the Characterization of Lithographically Prepared Structures
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853678
ER  -