Brown, J.
, Bertness, K.
, Baca, A.
and Victor, B.
(2011),
ALD for reliable nanowire self-assembly on microfabricated electrodes, ICQNM 2011, Nice/Saint Laurent du Var, FR
(Accessed December 15, 2024)
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ALD for reliable nanowire self-assembly on microfabricated electrodes
Published
Author(s)
Joseph J. Brown, , Alicia I. Baca, Bright M. Victor
Abstract
The use of ALD TiO2 surface coating improves dielectrophoretic assembly yield of individual GaN nanowires on micro-fabricated structures by as much as 67%. With titanium dioxide coating, individual nanowires were placed across suspended electrode pairs in 46% of tests (147 out of 320 total), versus 28% of tests (88 out of 320 total tests) that used uncoated GaN NWs. An additional result from these tests was that suspending the electrodes 2 µm above the substrate corresponded in most cases with about 15% improvement in assembly yield over that of electrodes fabricated directly on the substrate.Proceedings Title
ICQNM 2011
Conference Dates
August 21-27, 2011
Conference Location
Nice/Saint Laurent du Var, FR
Conference Title
The Fifth International Conference on Quantum, Nano and Micro Technologies
Pub Type
Conferences
Keywords
dielectrophoresis, self-assembly, atomic layer deposition, titanium dioxide, nanowires
Citation
Issues
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Created August 9, 2011, Updated October 12, 2021