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ALD for reliable nanowire self-assembly on microfabricated electrodes



Joseph J. Brown, Kristine A. Bertness, Alicia I. Baca, Bright M. Victor


The use of ALD TiO2 surface coating improves dielectrophoretic assembly yield of individual GaN nanowires on micro-fabricated structures by as much as 67%. With titanium dioxide coating, individual nanowires were placed across suspended electrode pairs in 46% of tests (147 out of 320 total), versus 28% of tests (88 out of 320 total tests) that used uncoated GaN NWs. An additional result from these tests was that suspending the electrodes 2 µm above the substrate corresponded in most cases with about 15% improvement in assembly yield over that of electrodes fabricated directly on the substrate.
Proceedings Title
ICQNM 2011
Conference Dates
August 21-27, 2011
Conference Location
Nice/Saint Laurent du Var, FR
Conference Title
The Fifth International Conference on Quantum, Nano and Micro Technologies


dielectrophoresis, self-assembly, atomic layer deposition, titanium dioxide, nanowires


Brown, J. , Bertness, K. , Baca, A. and Victor, B. (2011), ALD for reliable nanowire self-assembly on microfabricated electrodes, ICQNM 2011, Nice/Saint Laurent du Var, FR (Accessed April 21, 2024)
Created August 9, 2011, Updated October 12, 2021