ALD for reliable nanowire self-assembly on microfabricated electrodes
Joseph J. Brown, Kristine A. Bertness, Alicia I. Baca, Bright M. Victor
The use of ALD TiO2 surface coating improves dielectrophoretic assembly yield of individual GaN nanowires on micro-fabricated structures by as much as 67%. With titanium dioxide coating, individual nanowires were placed across suspended electrode pairs in 46% of tests (147 out of 320 total), versus 28% of tests (88 out of 320 total tests) that used uncoated GaN NWs. An additional result from these tests was that suspending the electrodes 2 µm above the substrate corresponded in most cases with about 15% improvement in assembly yield over that of electrodes fabricated directly on the substrate.
August 21-27, 2011
Nice/Saint Laurent du Var, FR
The Fifth International Conference on Quantum, Nano and Micro Technologies