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Displaying 526 - 550 of 757

Electron Collision Data for Plasma-Processing Gases

October 1, 2000
Author(s)
Loucas G. Christophorou, James K. Olthoff
Low-temperature plasma applications require detailed understanding of the physical and chemical processes occurring in the plasmas themselves. For instance, as the push for smaller feature sizes and higher quality devices in the semiconductor industry has

Electron Interactions with Excited Atoms and Molecules

October 1, 2000
Author(s)
Loucas G. Christophorou, James K. Olthoff
Elastic, inelastic, and superelastic scattering of electrons by and electron-impact ionization of excited atoms are reviewed and discussed and the role of the electric dipole polarizabilty in the interaction of slow electrons with excited atoms is

Inductively Coupled Plasmas in Low Global Warming Potential Gases

August 1, 2000
Author(s)
Amanda N. Goyettes, Yicheng Wang, James K. Olthoff
Many high density discharges used in microelectronics fabrication use fluorocarbon gases with coincidentally high global-warming potentials (GWPs). We have determined the identities, fluxes, and energy distributions of ions produced in high density

Automated Parameter Extraction Software for Advanced IGBT Modeling

July 10, 2000
Author(s)
Allen R. Hefner Jr., Sebastien Bouche
A software package for extracting parameters used in advanced IGBT models is presented. In addition, new model equations and extraction procedures are introduced that more accurately describe a wide range of IGBT types including the recently developed Warp

Multiport Noise Characterization and Differential Amplifiers

June 1, 2000
Author(s)
James P. Randa
I address the issue of the definition and measurement of noise figure and parameters to characterize multiport devices, particularly differential amplifiers. A parameterization in terms of the noise matrix appears to be the most practical. The noise figure

4 Amp 4H-SiC JBD Diodes

May 1, 2000
Author(s)
Ranbir Singh, Sei-Hyung Ryu, M. Palmer, Allen R. Hefner Jr., Jih-Sheng Lai

Noise-Source Stability Measurements

May 1, 2000
Author(s)
James P. Randa, L. A. Terrell, Lawrence P. Dunleavy
We report results of stability tests on several noise sources for selected frequencies between 12 and 26.5 GHz. Measurements covered intervals of about 1 week and about 1 year or more. Drifts in noise temperature were typically less than the uncertainty of

Design and Testing of NFRad - A New Noise Measurement System

March 1, 2000
Author(s)
Chriss A. Grosvenor, James P. Randa, Robert L. Billinger
The NIST Noise project has constructed and tested a new, automated, coaxial (GPC-7) radiometer for the measurement of noise sources in the 8-12 GHz frequency band. It is an isolated, total-power radiometer that relies on lookup tables for relevant

Failure Dynamics of the IGBT During Turn-Off for Unclamped Inductive Loading Conditions

March 1, 2000
Author(s)
Chien-Chung Shen, Allen R. Hefner Jr., David W. Berning, J B. Bernstein
The internal failure dynamics of the Insulated Gate Bipolar Transistor (IBGT) for unclamped inductive switching (UIS) conditions are studied using simulations and measurements. The UIS measurements are made using a unique, automated nondestructive Reverse

Early Streamer Emission Lightning Protection Systems: An Overview

January 1, 2000
Author(s)
Richard J. Van Brunt, Thomas L. Nelson, Ken L. Stricklett
Early streamer emission (ESE) lightning protection systems are a relatively new approach to the perennial problem of lightining damage, and these systems may hold promise for a more effective protection against lighting. However, the scientific and

Electron Interactions with CF 3 I

January 1, 2000
Author(s)
Loucas G. Christophorou, James K. Olthoff
Low-energy electron collision data for the plasma processing gas CF 3I are sparse. Limited cross section data are available only for total and differential elastic electron scattering, electron-impact ionization, and electron attachment processes. These

Causality and Characteristic Impedance

December 2, 1999
Author(s)
Dylan F. Williams, Bradley K. Alpert
A new causal power-normalized waveguide equivalent-circuit theory fixes both the magnitude and phase of the characteristic impedance of a waveguide.

Ion-Molecule Reactions and Ion Energies in CF 4 Discharges

December 1, 1999
Author(s)
B. Peko, I. V. Dyakov, R. Champion, MVVS. Rao, James K. Olthoff
Absolute cross sections have been measured for reactants typically found in carbon tetrafluoride (CF 4) discharges for collision energies below a few hundred electron volts. The reactions investigated include collision-induced dissociation and dissociative
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