Ion-Molecule Reactions and Ion Energies in CF4 Discharges

Published

December 1, 1999

Author(s)

B. Peko, I. V. Dyakov, R. Champion, MVVS. Rao, James K. Olthoff

Abstract

Absolute cross sections have been measured for reactants typically found in carbon tetrafluoride (CF₄) discharges for collision energies below a few hundred electron volts. The reactions investigated include collision-induced dissociation and dissociative electron transfer reactions for CF₃+ and F+ colliding with CF₄, and collisional electron detachment for F- colliding with CF₄. Also presented are measurements of energies and relative intensities of ions generated in dc Townsend CF₄ discharges with E/N values ranging from 4 x 10^-18 V m² (4 to 25 kTd). Ion energy and ion intensity data for the Townsend discharges are analyzed in light of the measured cross sections.

Citation

Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)

Volume

60

Issue

6

Pub Type

Journals

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Keywords

CF₄, collision induced dissociation, cross sections, dissociative charge transfer, ion energies, ion molecule reactions, Townsend discharge

Citation

Peko, B. , Dyakov, I. , Champion, R. , Rao, M. and Olthoff, J. (1999), Ion-Molecule Reactions and Ion Energies in CF₄ Discharges, Physical Review E (Statistical, Nonlinear, and Soft Matter Physics), [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=15076 (Accessed October 5, 2024)