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Ion-Molecule Reactions and Ion Energies in CF4 Discharges

Published

Author(s)

B. Peko, I. V. Dyakov, R. Champion, MVVS. Rao, James K. Olthoff

Abstract

Absolute cross sections have been measured for reactants typically found in carbon tetrafluoride (CF4) discharges for collision energies below a few hundred electron volts. The reactions investigated include collision-induced dissociation and dissociative electron transfer reactions for CF3+ and F+ colliding with CF4, and collisional electron detachment for F- colliding with CF4. Also presented are measurements of energies and relative intensities of ions generated in dc Townsend CF4 discharges with E/N values ranging from 4 x 10-18 V m2 (4 to 25 kTd). Ion energy and ion intensity data for the Townsend discharges are analyzed in light of the measured cross sections.
Citation
Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
Volume
60
Issue
6

Keywords

CF<sub>4</sub>, collision induced dissociation, cross sections, dissociative charge transfer, ion energies, ion molecule reactions, Townsend discharge

Citation

Peko, B. , Dyakov, I. , Champion, R. , Rao, M. and Olthoff, J. (1999), Ion-Molecule Reactions and Ion Energies in CF<sub>4</sub> Discharges, Physical Review E (Statistical, Nonlinear, and Soft Matter Physics), [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=15076 (Accessed May 20, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created November 30, 1999, Updated October 12, 2021