Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Electron Interactions with CF3I

Published

Author(s)

Loucas G. Christophorou, James K. Olthoff

Abstract

Low-energy electron collision data for the plasma processing gas CF3I are sparse. Limited cross section data are available only for total and differential elastic electron scattering, electron-impact ionization, and electron attachment processes. These data are synthesized, assessed, and discussed in this paper. There is a need for further scrutiny of these data and for measurements of the cross sections of the other main electron-collision processes. There is a need also for measurements of the electron transport, ionization, and attachment coefficients of this molecule
Citation
J. Phys. & Chem. Ref. Data (JPCRD) -
Volume
29
Issue
4

Keywords

CF<sub>3</sub>I, electron interactions, trifluoroiodomedthane

Citation

Christophorou, L. and Olthoff, J. (2000), Electron Interactions with CF<sub>3</sub>I, J. Phys. & Chem. Ref. Data (JPCRD), National Institute of Standards and Technology, Gaithersburg, MD, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=26781 (Accessed April 12, 2024)
Created December 31, 1999, Updated October 12, 2021