Time-resolved Measurements of Ion Energy Distributions and Optical Emissions in Pulsed Radio-Frequency Discharges
Yicheng Wang, Eric C. Benck, Martin Misakian, M. Edamura, James K. Olthoff
In pulse-modulated inductively coupled plasmas generated in CF4:Ar mixtures, a transition between a capacitive coupling mode (E mode) and an inductive coupling mode (H mode) was observed. For a pulsed plasma in a 50%CF4:50%Ar volume mixture with the peak rf power of 200 W at 13.56 MHz and the modulation frequency at 500 Hz with a duty cycle of 95%, the E->H mode transition occurs repetitively 0.75 ms after each rf pulse is applied. This long delay in the mode transition allows us to perform not only time-resolved measurements of optical emission and electrical characteristics but also time-resolved measurements of ion energy distributions at the grounded electrode. These measurements show that a relatively short rf off period can severely perturb the equilibrium plasma state and its recovery may take much longer than the rf off period.
, Benck, E.
, Misakian, M.
, Edamura, M.
and Olthoff, J.
Time-resolved Measurements of Ion Energy Distributions and Optical Emissions in Pulsed Radio-Frequency Discharges, Journal of Applied Physics, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=9483
(Accessed November 30, 2023)