@article{764911,
  author = {Yicheng Wang and Eric Benck and Martin Misakian and M. Edamura and James Olthoff},
  title = {Time-resolved Measurements of Ion Energy Distributions and Optical Emissions in Pulsed Radio-Frequency Discharges},
  year = {2000},
  number = {87},
  month = {2000-03-01 00:03:00},
  publisher = {Journal of Applied Physics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=9483},
  language = {en},
}