TY  - JOUR
AU  - Yicheng Wang
AU  - Eric Benck
AU  - Martin Misakian
AU  - M. Edamura
AU  - James Olthoff
C2  - Journal of Applied Physics
DA  - 2000-03-01 00:03:00
LA  - en
M1  - 87
PB  - Journal of Applied Physics
PY  - 2000
TI  - Time-resolved Measurements of Ion Energy Distributions and Optical Emissions in Pulsed Radio-Frequency Discharges
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=9483
ER  -