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Theodore V. Vorburger, K Yee, Brian R. Scace, F Rudder
The automated control of machine-tool accuracy is discussed based on a quality architecture containing three control loops: real-time, process-intermittent, and post-process. This paper highlights the post-process loop. The architecture is being
Atomic force microscope (AFM) is a rapidly evolving technique which has been used in numerous academic studies since its invention eight years ago. AFM manufacturers are now marketing instruments for industrial metrology applications. The National
Advances in the manufacture of integrated circuits, x-ray optics, magnetic read-write heads, optical data storage media, razor blades, etc. require advances in ultraprecision metrology. Each of these industries is currently investigating the use of Atomic
Jun-Feng Song, F Rudder, Theodore V. Vorburger, A Hartman, Brian R. Scace, J Smith
By using a stylus instrument, a series of calibration and check standards, and calibration and uncertainty calculation procedures, we have calibrated Rockwell diamond indenters with a traceability to fundamental measurements. The combined measurement
This chapter discusses the modern concept of traceability as it applies to CMM measurements of manufactured parts. It shows the means by which those dimensional measurements are functionally related to the international standard of length, the various
The emphasis on International Standards Organization (ISO) certification of laboratories has resulted in a renewed interest in NIST traceable standards for scanning electron microscopy (SEM). Under ISO certification, it is mandatory to calibrate and
Time-of-flight secondary ion mass spectrometry (TOF-SIMS) is an efficient, sensitive method for characterizing semiconductor surfaces. In addition, TOF-SIMS can be applied in a depth profiling mode allowing qualitative characterization of the top 10?20 nm
This report examines the effects of uncertainties in temperature and coefficient of thermal expansion on the expanded uncertainty of length dimensional measurements made away from the international standard reference temperature of 20degrees C for artifact
The National Institute of Standards and Technology has investigated the efficacy of indicating gaging systems used to measure pitch diameter and functional size of threaded fasteners. Three external systems and four internal systems, representing four
H. W. Tseng, John A. Dagata, Richard M. Silver, Joseph Fu, J R. Lowney
Scanning tunneling microscopy (STM) and atomic force microscopy operating in air have been used to investigate locations of molecular-beam epitaxially grown GaAs multiple pn junctions cleaved and passivated with P(2)S(5). Symmetrically and asymmetrically
Keith A. Stouffer, John L. Michaloski, B Russell, Frederick M. Proctor
This paper describes an automated finishing system called the Advanced Deburring and Chamfering System (ADACS). ADACS uses the Real-Time Control System (RCS), a hierarchical controller architecture that was developed at the National Institute of Standards
In this paper we summarize a number of previous experiments on the measurement of the roughness of metallic surfaces by light scattering. We identify several regimes that permit measurement of different surface parameters and functions, and we establish
R N. Watts, Charles S. Tarrio, Thomas B. Lucatorto, R P. Madden, R Deslattes, Ariel Caticha, William T. Estler, Christopher J. Evans, T. McWade, Joseph Fu, Theodore V. Vorburger
Datums have been one of the most difficult problems the Group has dealt with. With the definition outlined, we feel we now have the problem under control. While our definition is not perfect, we can live with it. We are now in the process of expanding this
The ready availability of inexpensive and standard communications hardware in the late 1980's, coupled with sufficient standardization of intermediate-layer protocols to make reliable machine-to-machine communications thorough any combination of standard