Mcwaid, T.
, Vorburger, T.
, Fu, J.
, Song, J.
and Whitenton, E.
(1994),
Methods Divergence Between Measurements of Micrometer and Sub-Micrometer Surface Features, Nanotechnology
(Accessed October 6, 2024)
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Methods Divergence Between Measurements of Micrometer and Sub-Micrometer Surface Features
Published
Author(s)
T Mcwaid, , , ,
Abstract
Measurements of micrometer and sub-micrometer surface features have been made using a stylus profiler, an STM, an AFM, and a phase-measuring interferometric microscope. The differences between measurements of the same surface feature as obtained with the different instruments illustrate the problem of methods divergence. Measurements are compared in an effort to point out, and explain, the observed methods divergence.Citation
Nanotechnology
Volume
5
Pub Type
Journals
Citation
Issues
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Created December 31, 1993, Updated October 12, 2021