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Methods Divergence Between Measurements of Micrometer and Sub-Micrometer Surface Features

Published

Author(s)

T Mcwaid, Theodore V. Vorburger, Joseph Fu, Jun-Feng Song, Eric P. Whitenton

Abstract

Measurements of micrometer and sub-micrometer surface features have been made using a stylus profiler, an STM, an AFM, and a phase-measuring interferometric microscope. The differences between measurements of the same surface feature as obtained with the different instruments illustrate the problem of methods divergence. Measurements are compared in an effort to point out, and explain, the observed methods divergence.
Citation
Nanotechnology
Volume
5

Citation

Mcwaid, T. , Vorburger, T. , Fu, J. , Song, J. and Whitenton, E. (1994), Methods Divergence Between Measurements of Micrometer and Sub-Micrometer Surface Features, Nanotechnology (Accessed February 28, 2024)
Created December 31, 1993, Updated October 12, 2021