@article{756606,
  author = {T Mcwaid and Theodore Vorburger and Joseph Fu and Jun-Feng Song and Eric Whitenton},
  title = {Methods Divergence Between Measurements of Micrometer and Sub-Micrometer Surface Features},
  year = {1994},
  number = {5},
  month = {1994-01-01 00:01:00},
  publisher = {Nanotechnology},
  language = {en},
}