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PUBLICATIONS

In Situ Tip Characterization for AFM and Application to Linewidth Metrology

Published

Author(s)

Ronald G. Dixson, J Schneir, T Mcwaid, Theodore V. Vorburger

Abstract

Abstract not available.
Proceedings Title
International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication
Conference Dates
January 1, 1995
Conference Location
Scottsdale, AZ
Pub Type
Conferences
Manufacturing and Metrology

Citation

Dixson, R. , Schneir, J. , Mcwaid, T. and Vorburger, T. (1994), In Situ Tip Characterization for AFM and Application to Linewidth Metrology, International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, Scottsdale, AZ (Accessed January 22, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 1, 1994, Updated February 19, 2017