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In Situ Tip Characterization for AFM and Application to Linewidth Metrology

Published

Author(s)

Ronald G. Dixson, J Schneir, T Mcwaid, Theodore V. Vorburger

Abstract

Abstract not available.
Proceedings Title
International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication
Conference Dates
January 1, 1995
Conference Location
Scottsdale, AZ

Citation

Dixson, R. , Schneir, J. , Mcwaid, T. and Vorburger, T. (1994), In Situ Tip Characterization for AFM and Application to Linewidth Metrology, International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, Scottsdale, AZ (Accessed April 21, 2024)
Created January 1, 1994, Updated February 19, 2017