Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Conferences

SEM Sentinel - SEM Performance Measurement System

Author(s)
Bradley N. Damazo, Andras Vladar, Alice V. Ling, M A. Donmez, Michael T. Postek, Crossley E. Jayewardene
This paper describes the design and implementation of a system for monitoring the performance of a critical dimension measurement scanning electron microscope...

Kinematic Modeling and Analysis of a Planar Micro-Positioner

Author(s)
Nicholas G. Dagalakis, John A. Kramar, E Amatucci, Robert Bunch
The static and dynamic performance of a control system depends on the accuracy of the mathematical model of the plant that is being controlled. In this work...

Overlay Metrology: Recent Advances and Future Solutions

Author(s)
Richard M. Silver, Jay S. Jun, S Fox, Edward A. Kornegay
As devices shrink and clock speeds continue to increase, process control and measurement of I critical dimension linewidths and the essential overlay of...

Neolithography Consortium: A Progress Report

Author(s)
James E. Potzick
The role of process simulation is becoming an increasingly important part of microlithography process control and photomask metrology as wafer feature sizes...

Single-frequency and Mode-locked Er/Yb Co-doped Waveguide Lasers

Author(s)
Berton Callicoatt, John B. Schlager, Kevin L. Silverman, Robert K. Hickernell, Richard P. Mirin, Norman A. Sanford, Joseph S. Hayden, Samuel D. Conzone, Robert D. Simpson
We present results for single-frequency and mode-locked Er/Yb co-doped waveguide lasers. The single-frequency DBR waveguide lasers have output power in excess...

Wavelength standards for optical communications

Author(s)
Sarah L. Gilbert, William C. Swann, Tasshi Dennis
We review wavelength accuracy and calibration issues for wavelength division multiplexed (WDM) optical fiber communication and describe our work on wavelength...

Evolution of the Shapes of InAs and InGaAs Quantum Dots

Author(s)
Richard P. Mirin, Alexana Roshko, M. van der Puijl, Andrew G. Norman
The exact shape of self-assembled quantum dots is still a controversial subject in the literature, despite the fact that this knowledge is of paramount...

Method of Measuring Shunt Resistance of Photodiodes

Author(s)
P R. Thompson, Thomas C. Larason
A method of measuring the shunt resistance of diodes, specifically photodiodes, is examined and the procedure of how the method is implemented using LabVIEW is...

Atomic Level Surface Metrology

Author(s)
Theodore V. Vorburger, Ronald G. Dixson, Jun-Feng Song, Thomas Brian Renegar, Joseph Fu, Ndubuisi George Orji, V W. Tsai, E. C. Williams, H Edwards, D Cook, P West, R Nyffenegger
MotivationSemiconductor wafers and many types of optical elementsrequire ultra-smooth surfaces in order to functionas specifiedExamples:Laser gyro mirrors with...

SI Traceability of Force at the Nanonewton Level

Author(s)
David B. Newell, Jon R. Pratt, John A. Kramar, Douglas T. Smith, L Feeney, Edwin R. Williams
Although nanonewton force measurements are commonplace in industry, no National Measurement Institute supports a link to the International System of Units (SI)...

Low Voltage Microanalysis using Microcalorimeter EDS

Author(s)
David A. Wollman, Sae Woo Nam, Gene C. Hilton, Kent D. Irwin, David A. Rudman, Norman F. Bergren, Steven Deiker, John M. Martinis, Martin Huber, Dale Newbury
We present the current performance of the prototype high-resolution microcalorimeter energy-dispersive spectrometer (υcal EDS) developed at NIST for x-ray...

Future Voltage Metrology at NIST

Author(s)
Yi-hua D. Tang, June E. Sims, Michael H. Kelley
Presently NIST uses a voltage calibration path to maintain the U.S. legal volt and provide for the dissemination of an internationally consistent, accurate...

Broadband Dielectric Relaxation of Polymer Composite Films

Author(s)
C. K. Chiang, R Popielarz, R Nozaki, Jan Obrzut
The broadband dielectric relaxation of a BaTiO3-polymer composite film was studied. The complex dielectric constant data from 10 -4 Hz to 10 10 Hz reveals the...
Was this page helpful?