Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Monte Carlo Simulation for Radiometric Temperature Measurement in Rapid Thermal Processing

Published

Author(s)

Yong Zhou, Y J. Shen, Z M. Zhang, Benjamin K. Tsai, D P. DeWitt

Abstract

This work employs a Monte Carlo method to study the radiative process in a rapid thermal processing (RTP) furnace. A true effective emissivity, accounting for the directional optical properties, is defined and predicted in order to determine the wafer temperature from the measured spectral radiance temperature using light-pipe radiation thermometry (LPRT). The true effective emissivity is the same as the hemispherical effective emissivity for diffuse wafers, in which case the Monte Carlo model gives the same results as the net-radiation method. Deviations exist between the hemispherical effective emissivity and the true effective emissivity for specular wafers because the effective emissivity is directional dependent. This research will help reduce the uncertainty in the temperature measurement for RTP furnaces to meet the future requirement for integrated circuit manufacturing.
Proceedings Title
Vol. 5 Industrial Applications of Computational Heat Transfer, Session | | | ASME
Volume
366
Issue
No. 5
Conference Dates
November 1, 2000
Conference Location
Undefined
Conference Title
ASME -Publications- HTD

Keywords

effective emissivity, light pipe radiation thermometry (LPRT), Monte Carlo method, net radiation method, optical properties, radiometric temperature measurement, rapid thermal processing (RTP), temperature, uncertainty

Citation

Zhou, Y. , Shen, Y. , Zhang, Z. , Tsai, B. and DeWitt, D. (2000), Monte Carlo Simulation for Radiometric Temperature Measurement in Rapid Thermal Processing, Vol. 5 Industrial Applications of Computational Heat Transfer, Session | | | ASME, Undefined (Accessed February 26, 2024)
Created October 31, 2000, Updated October 12, 2021